Rolla, MO - September 08, 2006
Brewer Science, a leading supplier of advanced lithography materials, has signed an exclusive licensing agreement with The Dow Chemical Company (NYSE: DOW) which transfers to Brewer Science worldwide rights to develop, manufacture, sell and market spin-on silicon-containing ENSEMBLE™ dielectric coatings. Dow began several years ago to develop ENSEMBLE™ dielectric coatings for various uses and these versatile coatings have proven value in multiple applications for semiconductor processing applications such as, pre-metal dielectric, hardmask and shallow trench isolation applications.
Two years ago, Brewer Science and Dow initially entered into a joint development agreement to bring innovative ENSEMBLE ARC® coatings to market for lithographic applications. The synergy created by joining Dow’s proven leading-edge research on silicon-containing coatings together with Brewer Science’s leadership in the lithography materials development and sales channels allowed these materials to be rapidly introduced into the market to benefit customers. As a result of these improvements, ENSEMBLE ARC® coatings are currently part of the process of record (POR) at a major Asian semiconductor manufacturer for advanced photolithography applications. The materials are also a component in an early POR for an immersion process at a major United States manufacturer.
As we go to press, other applications are being explored that will greatly benefit future applications.
Andy Waite-Wright, Executive Director, Marketing and Sales for Brewer Science, perceives this agreement to be a successful milestone in the relationship between Brewer Science and Dow. “Our initial confidence in this exciting chemistry has paid off. Now that we have licensed this technology more broadly, we intend to develop it further to increase and broaden the total value it offers our industry. Brewer Science welcomes the addition of silicon-containing ARC® materials made possible by technology associated with ENSEMBLE coatings to our bottom anti-reflective coatings (BARC) product line.
Marvin Bourelle, Global Commercial Manager, of Dow’s Advanced Electronic Materials business indicates that Brewer Science is adding a very valuable asset to their product line with ENSEMBLE ARC® coatings. “The expertise and reach of Brewer Science in the anti-reflective coatings segment of the semiconductor industry is ideally suited for the advancement and application of ENSEMBLE dielectric coatings to enhance leading-edge wafer processing for IC and has significant potential in other relevant segments. This will allow Dow to focus on expanding its core business for CYCLOTENE™ dielectric materials for wafer level chip scale packaging (WLCSP), integrated passives (IP) and SiLK™ dielectric materials for advanced logic devices”
ENSEMBLE coating materials are a family of spin-on silicon-containing dielectric coatings with applications in the following areas:
- Immersion lithography processes
- Double patterning
- Use with low-k dielectric
- Shallow trench isolation
- Chemical-mechanical polishing
- Hardmask applications
- Pre-metal dielectric processes.
The use of ENSEMBLE ARC® as spin-on silicon-containing anti-reflective coatings has gained recognition in the industry due to its improved cost of ownership and superior performance compared to CVD and other spin-on silicon-based coatings. The outstanding advantages of an ENSEMBLE coating are:
- Reduced etch complexity compared to CVD films
- Easier resist re-work
- Improved photoresist compatibility over other spin-on silicon and CVD materials
- Long shelf life compared to most spin-on silicon materials
Brewer Science is an accomplished producer of electronics-grade chemicals that deliver high-quality chemical solutions. Please contact Brewer Science sales and marketing division for the latest developments in ENSEMBLE dielectric materials and silicon-containing anti-reflective coatings. Brewer Science will continue to introduce leading products from these technologies and platforms. Watch for future press and product releases.
About Brewer Science, Inc.
Under the leadership of Dr. Terry Brewer, president and founder, Brewer Science continues to seek innovative technologies, reliable products and responsive services, each attuned to the specific needs of individual customers.
Brewer Science is a multi-divisional technology company that provides product and process solutions and processes to the microelectronic, optoelectronic, sensors and MEMS industries. Founded in 1981, Brewer Science has been a leader in supplying high-quality chemicals to the integrated circuit industry. The company's family of products includes ARC® anti-reflective coatings for state-of-the-art photolithography applications; Cee® benchtop spinners, coaters and hot plates for custom wafer processing; Talon™ track systems and CON-TACT® planarization systems. Additional information about Brewer Science can be found at http://www.brewerscience.com.
About Dow Advanced Electronic Materials
The Dow Advanced Electronic Materials (AEM) business provides a portfolio of materials and technologies to support customer innovation in the electronics industry. Leveraging Dow's world-class research and manufacturing facilities, AEM develops and commercializes advanced material science solutions for the global electronics industry. Since 2001, the AEM business has launched CYCLOTENE™ advanced electronics resins,SiLK*™, and porousSiLK ™ dielectrics and packaging materials for the semiconductor market.
About The Dow Chemical Company
Dow is a diversified chemical company that harnesses the power of science and technology to improve living daily. The Company offers a broad range of innovative products and services to customers in more than 175 countries, helping them to provide everything from fresh water, food and pharmaceuticals to paints, packaging and personal care products. Built on a commitment to its principles of sustainability, Dow has annual sales of $46 billion and employs 42,000 people worldwide. References to "Dow" or the "Company" mean The Dow Chemical Company and its consolidated subsidiaries unless otherwise expressly noted.
®™* Trademark of The Dow Chemical Company ("Dow") or an affiliated company of Dow
ARC® is a registered trademark of Brewer Science, Inc.®
For Editorial Information:
Leslie Hatfield
The Dow Chemical Company
989-638-8666
Anne Lindgren
Brewer Science
+573.364.0300
alindgren@brewerscience.com
